For the slope in my yard, I did not till after solarizing, so the dead weeds/grass helped hold the seeds in place. It was years ago, but I am pretty sure I used a roller to help press the seeds into the ground for good soil contact.
I have a tendency to seed on the heavy side, and had no problem getting the meadow started.
My slope was moderate and easy to work on. If I had a steeper slope, I might consider a ditch, berm or swale at the top to help reduce water from running down the slope in big rain events.
Also, if you don't have a roller to press the seeds into the soul, your feet would work just fine, but might take a bit longer.
I am starting my third solarized meadow this spring, and I never tilled any of them. As long as you do something to press the seed to get good soil contact, I don't see the need to till. The meadow plants don't seem to mind the compacted soil, and loosen the soil over time.
Good luck! My wife & I both love the meadows, and we think the wildlife does too